TY  - BOOK
AU  - Orloff, Jon
AU  - Utlaut, Mark
AU  - Swanson, Lynwood
PY  - 2003
DA  - 2003//
TI  - High resolution focused ion beams: FIB and its applications ; the physics of liquid metal ion sources and ion optics and their application to focused ion beam technology
PB  - Kluwer Academic, Plenum Publ.
CY  - New York, NY [u.a.]
KW  - Focused ion beams
KW  - Industrial applications
KW  - Ion bombardment
SN  - 030647350X
LA  - English
N1  - Jon Orloff; Mark Utlaut and Lynwood Swanson
ID  - 356125351
ER  -