TY  - BOOK
AU  - Richards, B. P.
AU  - Footner, P. K.
PY  - 1992
DA  - 1992//
TI  - role of microscopy in semiconductor failure analysis
T3  - Oxford science publications
PB  - Oxford Univ. Press
CY  - Oxford [u.a.]
KW  - Semiconductors
KW  - Microscopy
KW  - SemiconductorsTesting
KW  - SemiconductorsFailures
KW  - Microscopes
SN  - 0198564325
LA  - English
N1  - B. P. Richards and P. K. Footner
ID  - 275361500
ER  -