TY - BOOK ED - Goddard, William A. PY - 2012 DA - 2012// TI - Handbook of nanoscience, engineering, and technology ET - 3. ed. PB - CRC Press CY - Boca Raton, Fla. [u.a.] KW - Nanotechnology KW - Nanoscience KW - Microelectromechanical systems SN - 9781439860151 LA - English N1 - ed. by William A. Goddard III ... ID - 668588608 ER -