TY  - BOOK
ED  - Fung, Clifford D.
ED  - Cheung, P. W.
PY  - 1985
DA  - 1985//
TI  - Micromachining and micropackaging of transducers: [papers from the Workshop on Micromachining and Micropackaging of Transducers ..., on Nov. 7 - 9, 1984]
T3  - Studies in electrical and electronic engineering 20
PB  - Elsevier
CY  - Amsterdam [u.a.]
KW  - Transducers
KW  - Design and construction
KW  - Electronic equipment. Transducers. Miniaturisation
KW  - Miniature electronic equipment
KW  - TransducersDesign and constructionCongresses
KW  - MicromachiningCongresses
SN  - 0444425608
LA  - English
N1  - Clifford D. Fung ...
ID  - 040303616
ER  -