%0 Book
%T High resolution focused ion beams: FIB and its applications ; the physics of liquid metal ion sources and ion optics and their application to focused ion beam technology
%A Orloff, Jon
%A Utlaut, Mark
%A Swanson, Lynwood
%D 2003
%I Kluwer Academic, Plenum Publ.
%C New York, NY [u.a.]
%@ 030647350X
%G English
%F 356125351
%O Jon Orloff; Mark Utlaut and Lynwood Swanson
%O Exemplare erscheinen in unterschiedlichen Größen (Formate)
%O Includes bibliographical references and index
%L 621.38152
%K Focused ion beams
%K Industrial applications
%K Ion bombardment
%9 Text