%0 Book
%T role of microscopy in semiconductor failure analysis
%A Richards, B. P.
%A Footner, P. K.
%S Oxford science publications
%D 1992
%I Oxford Univ. Press
%C Oxford [u.a.]
%@ 0198564325
%G English
%F 275361500
%O B. P. Richards and P. K. Footner
%O Includes index
%O Archivierung prüfen 20200919 DE-640 1 pdager
%L 621.381520287
%K Semiconductors
%K Microscopy
%K SemiconductorsTesting
%K SemiconductorsFailures
%K Microscopes
%9 Text