%0 Book
%T Micromachining and micropackaging of transducers: [papers from the Workshop on Micromachining and Micropackaging of Transducers ..., on Nov. 7 - 9, 1984]
%E Fung, Clifford D.
%E Cheung, P. W.
%S Studies in electrical and electronic engineering 20
%D 1985
%I Elsevier
%C Amsterdam [u.a.]
%@ 0444425608
%G English
%F 040303616
%O Clifford D. Fung ...
%O Papers from the Workshop on Micromachining and Micropackaging of Transducers, organized by the faculty associated with the Semiconductor Chemical Transducer Resource at Case Western Reserve University, on Nov. 7-9, 1984
%O Archivierung prüfen 20200919 DE-640 3 pdager
%L 621.3815'1
%K Transducers
%K Design and construction
%K Electronic equipment. Transducers. Miniaturisation
%K Miniature electronic equipment
%K TransducersDesign and constructionCongresses
%K MicromachiningCongresses
%9 Text
%9 Konferenzschrift