@Book{356125351, author="Orloff, Jon and Utlaut, Mark and Swanson, Lynwood", title="High resolution focused ion beams: FIB and its applications ; the physics of liquid metal ion sources and ion optics and their application to focused ion beam technology", year="2003", publisher="Kluwer Academic, Plenum Publ.", address="New York, NY [u.a.]", keywords="Focused ion beams; Industrial applications; Ion bombardment", note="Jon Orloff; Mark Utlaut and Lynwood Swanson", note="Exemplare erscheinen in unterschiedlichen Gr{\"o}{\ss}en (Formate)", note="Includes bibliographical references and index", isbn="030647350X", language="English" }