@Book{275361500,
author="Richards, B. P.
and Footner, P. K.",
title="role of microscopy in semiconductor failure analysis",
series="Oxford science publications",
year="1992",
publisher="Oxford Univ. Press",
address="Oxford [u.a.]",
keywords="Semiconductors; Microscopy; SemiconductorsTesting; SemiconductorsFailures; Microscopes",
note="B. P. Richards and P. K. Footner",
note="Includes index",
note="Archivierung pr{\"u}fen 20200919 DE-640 1 pdager",
isbn="0198564325",
language="English"
}