@Book{040303616,
editor="Fung, Clifford D.
and Cheung, P. W.",
title="Micromachining and micropackaging of transducers: [papers from the Workshop on Micromachining and Micropackaging of Transducers ..., on Nov. 7 - 9, 1984]",
series="Studies in electrical and electronic engineering 20",
year="1985",
publisher="Elsevier",
address="Amsterdam [u.a.]",
keywords="Transducers; Design and construction; Electronic equipment. Transducers. Miniaturisation; Miniature electronic equipment; TransducersDesign and constructionCongresses; MicromachiningCongresses",
note="Clifford D. Fung ...",
note="Papers from the Workshop on Micromachining and Micropackaging of Transducers, organized by the faculty associated with the Semiconductor Chemical Transducer Resource at Case Western Reserve University, on Nov. 7-9, 1984",
note="Archivierung pr{\"u}fen 20200919 DE-640 3 pdager",
isbn="0444425608",
language="English"
}